4. Semiconductor device manufacturing: process
  5. Cleaning of reaction chamber

Karl Emerson Mautz

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Assembly comprising a plurality of mask containers,...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Lithography method for forming semiconductor devices on a...

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate

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Method and apparatus for processing a semiconductor wafer on a r

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Patent

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Method for chemical mechanical polishing (CMP) with altering...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Method for measuring a characteristic of a semiconductor wafer u

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
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