Assembly comprising a plurality of mask containers,...

Details Assembly comprising a plurality of mask containers,... Assembly comprising a plurality of mask containers,...

2005-05-17

2005-05-17

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S115000

Reexamination Certificate

active

06895294

ABSTRACT:
The present invention relates to a system for the manufacture of semiconductor devices by lithography, and in particular to an assembly of mask containers for use in such a system. The system comprises: a plurality of mask containers adapted to engage with one another such that two or more containers can be carried together as a stack; a plurality of lithography bays; a transport rail system for carrying the containers between different lithography bays. Each lithography bay has a transmitter/receiver unit for communicating lithography data with a tracking device located in each container, allowing for more efficient mask management. The transportation of the containers in stacks results in an improvement in efficiency.

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patent: 6662950 (2003-12-01), Cleaver
patent: WO 0056633 (2000-09-01), None

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