Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-05-17
2005-05-17
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S115000
Reexamination Certificate
active
06895294
ABSTRACT:
The present invention relates to a system for the manufacture of semiconductor devices by lithography, and in particular to an assembly of mask containers for use in such a system. The system comprises: a plurality of mask containers adapted to engage with one another such that two or more containers can be carried together as a stack; a plurality of lithography bays; a transport rail system for carrying the containers between different lithography bays. Each lithography bay has a transmitter/receiver unit for communicating lithography data with a tracking device located in each container, allowing for more efficient mask management. The transportation of the containers in stacks results in an improvement in efficiency.
REFERENCES:
patent: 5166884 (1992-11-01), Maney et al.
patent: 5411358 (1995-05-01), Garric et al.
patent: 6098809 (2000-08-01), Okada et al.
patent: 6259961 (2001-07-01), Inoue et al.
patent: 6468021 (2002-10-01), Bonora et al.
patent: 6481558 (2002-11-01), Bonora et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6662950 (2003-12-01), Cleaver
patent: WO 0056633 (2000-09-01), None
Charles Alain Bernhard
Maltabes John George
Mautz Karl Emerson
Schuster Ralf
Cabrera Zoila
Chiu Joanna G.
Infineon - Technologies AG
Infineon Technologies SC300 GmbH & Co. oHG
Picard Leo
LandOfFree
Assembly comprising a plurality of mask containers,... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Assembly comprising a plurality of mask containers,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Assembly comprising a plurality of mask containers,... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3385942