4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type

Karel Diederick VAN DER Mast

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Correction device for correcting the spherical aberration in...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Maskless lithography systems and methods utilizing spatial...

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Metrology tool, system comprising a lithographic apparatus...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-31339

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