Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2008-03-25

2008-03-25

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000, C355S071000

Reexamination Certificate

active

07349068

ABSTRACT:
A system and method are provided including different moveable lenses within a projection system that can be placed in the path of a radiation beam to change a magnification of the projection system. By changing the magnification of the projection system an area of a substrate exposed per pixel can be adjusted, and a throughput of the system optimized.

REFERENCES:
patent: 3873189 (1975-03-01), Whitaker et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5617211 (1997-04-01), Nara et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 5801811 (1998-09-01), Lo et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5973863 (1999-10-01), Hatasawa et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6238852 (2001-05-01), Klosner
patent: 6425669 (2002-07-01), Kanatake et al.
patent: 6473237 (2002-10-01), Mei
patent: 6509955 (2003-01-01), Mei et al.
patent: 6552775 (2003-04-01), Yanagihara et al.
patent: 6556278 (2003-04-01), Tanaka et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6847461 (2005-01-01), Latypov et al.
patent: 6967711 (2005-11-01), Gui
patent: 7095568 (2006-08-01), Kobayashi et al.
patent: 2001/0048515 (2001-12-01), Mei
patent: 2002/0006561 (2002-01-01), Taniguchi
patent: 2002/0008863 (2002-01-01), Taniguchi et al.
patent: 2002/0012858 (2002-01-01), Kawkubo et al.
patent: 2003/0011756 (2003-01-01), Omura et al.
patent: 2003/0063366 (2003-04-01), Hunt
patent: 2003/0206281 (2003-11-01), Jain
patent: 2003/0233528 (2003-12-01), Ishikawa et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0159636 (2004-08-01), Sandstrom et al.
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0068599 (2005-03-01), Mushika
patent: 2005/0168790 (2005-08-01), Latypov et al.
patent: 2005/0264782 (2005-12-01), Ryzhikov et al.
patent: 2006/0012766 (2006-01-01), Klosner et al.
patent: 1 109 067 (2001-06-01), None
patent: 1 482 373 (2004-12-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
European Search Report, dated Apr. 19, 2006, for European Patent Application No. 05257490.2, 8 pages.

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