Electron microscope

Details Electron microscope Electron microscope

1976-08-24

1978-06-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

040951049

ABSTRACT:
In an electron microscope having a comparatively high resolution, a tilting motion about a point in an object to be imaged is imparted to the illuminating electron beam in order to adjust the coherence of the exposure of an object. For the exposure aperture, the aperture given by the degree of deflection then takes the place of the very small aperture of the illuminating electron beam. A preferred embodiment includes a correction device for the non-axial passage of the electron beam through a subsequent lens in the electron microscope. Operation with a conical exposure involving a present apex is also feasible.

REFERENCES:
patent: 3644733 (1972-02-01), Krahl
patent: 3786271 (1974-01-01), Joy et al.
patent: 3914608 (1975-10-01), Malmberg
patent: 3997807 (1976-12-01), Riddle et al.

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