Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-07-22
2008-07-22
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S069000
Reexamination Certificate
active
07403266
ABSTRACT:
A maskless lithography system that writes patterns on an object. The system can include an illumination system, the object, spatial light modulators (SLMs), and a controller. The SLMs can pattern light from the illumination system before the object receives the light. The SLMs can include a leading set and a trailing set of the SLMs. The SLMs in the leading and trailing sets change based on a scanning direction of the object. The controller can transmit control signals to the SLMs based on at least one of light pulse period information, physical layout information about the SLMs, and scanning speed of the object. The system can also correct for dose non-uniformity using various methods.
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Bleeker Arno
Cebuhar Wenceslao A.
Hintersteiner Jason Douglas
McCullough Andrew W.
VAN DER Mast Karel Diederick
ASML Holding N.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox PLLC
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