4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Grooved and refilled with deposited dielectric material

Kaan-Lu Tzou

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Method for preventing contact defects in interlayer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming a shallow trench isolation in a...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Multi-layer hard mask structure for etching deep trench in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Multi-layer hard mask structure for etching deep trench in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Multi-layer hard mask structure for etching deep trench in...

Stock material or miscellaneous articles – Composite – Of quartz or glass
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2702922

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