4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jusuke Ogura

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Avoiding field oxide gouging in shallow trench isolation...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Buried silicide local interconnect with sidewall spacers and...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Dual bit memory device with isolated polysilicon floating gates

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Innovative method of hard mask removal

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Memory wordline hard mask

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2514607

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