4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jun-Cheng Ko

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Contact process using taper contact etching and polycide step

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Contact structure using taper contact etching and polycide step

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for forming single sin layer as passivation film

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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Optimized dry etching procedure, using an oxygen containing ambi

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Self-aligned contact process implementing bias compensation...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-170359

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