4. Coherent light generators
  5. Particular beam control device
  6. Control of pulse characteristics

Juergen Kleinschmidt

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Absolute wavelength calibration of lithography laser using...

Coherent light generators – Particular beam control device – Optical output stabilization
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Adjusting device for the setpoint of an electric module

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Switch or casing therefor
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Arrangement for debris reduction in a radiation source based...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Arrangement for generating extreme ultraviolet (EUV)...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Arrangement for generating pulsed currents with a high...

Coherent light generators – Particular component circuitry
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Profile ID: LFUS-PAI-P-2204850

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