Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-05-17
2005-05-17
Lee, John R. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S505100, C378S119000, C378S121000, C378S122000, C378S145000, C315S111310, C315S111410, C313S231310, C313S231410, C219S121310, C219S121410
Reexamination Certificate
active
06894298
ABSTRACT:
The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possibility for generating EUV radiation in which an extended life of the system is achieved with stable generation of a dense, hot plasma column, is met according to the invention in that a preionization discharge is ignited between two parallel disk-shaped flat electrodes prior to the main discharge by a surface discharge along the superficies surface of a cylindrical insulator with a plasma column generated through the gas discharge with pulsed direct voltage, which preionization discharge carries out an ionization of the working gas in the discharge chamber by means of fast charged particles. The preionization discharge is triggered within a first electrode housing and the main discharge takes place between a narrowed output of the first electrode housing and a part of the second electrode housing close to the outlet opening of the discharge chamber. The plasma develops in a part of the second electrode housing covered by a tubular insulator and, as a result of the current-induced magnetic field, contracts to form a dense, hot plasma column, one end of which is located in the vicinity of the outlet opening of the second electrode housing.
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Ahmad Imtiaz
Kleinschmidt Juergen
Schriever Guido
Lee John R.
Reed Smith LLP
Vanore David A.
Xtreme technologies GmbH
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