Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate
2006-02-28
2006-02-28
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular beam control device
Optical output stabilization
C372S020000
Reexamination Certificate
active
07006541
ABSTRACT:
A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.
REFERENCES:
patent: 3806829 (1974-04-01), Duston et al.
patent: 4016504 (1977-04-01), Klauminzer
patent: 4309671 (1982-01-01), Malyon
patent: 4319843 (1982-03-01), Gornall
patent: 4331937 (1982-05-01), Brown et al.
patent: 4348647 (1982-09-01), Nighan et al.
patent: 4404366 (1983-09-01), Boguslaski et al.
patent: 4435808 (1984-03-01), Javan
patent: 4468773 (1984-08-01), Seaton
patent: 4513422 (1985-04-01), Buholz
patent: 4558952 (1985-12-01), Kulesh et al.
patent: 4592043 (1986-05-01), Williams
patent: 4611270 (1986-09-01), Klauminzer et al.
patent: 4823354 (1989-04-01), Znotins et al.
patent: 4829536 (1989-05-01), Kajiyama et al.
patent: 4856018 (1989-08-01), Nozue et al.
patent: 4905243 (1990-02-01), Lokai et al.
patent: 4911778 (1990-03-01), Barnoach
patent: 4914662 (1990-04-01), Nakatani et al.
patent: 4926428 (1990-05-01), Kajiyama et al.
patent: 4975919 (1990-12-01), Amada et al.
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5081635 (1992-01-01), Wakabayashi et al.
patent: 5095492 (1992-03-01), Sandstrom
patent: 5142543 (1992-08-01), Wakabayashi et al.
patent: 5144632 (1992-09-01), Thonn
patent: 5150370 (1992-09-01), Furuya et al.
patent: 5198872 (1993-03-01), Wakabayashi et al.
patent: 5218421 (1993-06-01), Wakabayashi et al.
patent: 5225884 (1993-07-01), Stark et al.
patent: 5226050 (1993-07-01), Burghardt
patent: 5307364 (1994-04-01), Turner
patent: 5373515 (1994-12-01), Wakabayashi et al.
patent: 5404366 (1995-04-01), Wakabayashi et al.
patent: 5420877 (1995-05-01), Sandstrom
patent: 5450207 (1995-09-01), Fomenkov
patent: 5450436 (1995-09-01), Mizoguchi et al.
patent: 5479431 (1995-12-01), Sobottke et al.
patent: 5559816 (1996-09-01), Basting et al.
patent: 5596596 (1997-01-01), Wakabayashi et al.
patent: 5642374 (1997-06-01), Wakabayashi et al.
patent: 5684822 (1997-11-01), Partlo
patent: 5748316 (1998-05-01), Wakabayashi et al.
patent: 5761236 (1998-06-01), Kleinschmidt et al.
patent: 5764678 (1998-06-01), Tada
patent: 5771094 (1998-06-01), Carter et al.
patent: 5802094 (1998-09-01), Wakabayashi et al.
patent: 5835520 (1998-11-01), Das et al.
patent: 5852627 (1998-12-01), Ershov
patent: 5856991 (1999-01-01), Ershov
patent: 5867514 (1999-02-01), Anderson
patent: 5898725 (1999-04-01), Fomenkov et al.
patent: 5901163 (1999-05-01), Ershov
patent: 5917849 (1999-06-01), Ershov
patent: 5946337 (1999-08-01), Govorkov et al.
patent: 5949806 (1999-09-01), Ness et al.
patent: 5970082 (1999-10-01), Ershov
patent: 5978391 (1999-11-01), Das et al.
patent: 5978394 (1999-11-01), Newman et al.
patent: 5978409 (1999-11-01), Das et al.
patent: 5982800 (1999-11-01), Ishihara et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6014398 (2000-01-01), Hofmann et al.
patent: 6028879 (2000-02-01), Ershov
patent: 6061129 (2000-05-01), Ershov et al.
patent: 6061382 (2000-05-01), Govorkov et al.
patent: 6078599 (2000-06-01), Everage et al.
patent: 6081542 (2000-06-01), Scaggs
patent: 6094448 (2000-07-01), Fomenkov et al.
patent: 6154470 (2000-11-01), Basting et al.
patent: 6157662 (2000-12-01), Scaggs et al.
patent: 6160831 (2000-12-01), Kleinschmidt et al.
patent: 6160832 (2000-12-01), Kleinschmidt et al.
patent: 6163559 (2000-12-01), Watson
patent: 6219368 (2001-04-01), Govorkov
patent: 6240110 (2001-05-01), Ershov
patent: 6243163 (2001-06-01), Wakabayashi et al.
patent: 6243170 (2001-06-01), Ershov
patent: 6269110 (2001-07-01), Leinhos et al.
patent: 6272158 (2001-08-01), Kleinschmidt et al.
patent: 6285701 (2001-09-01), Albrecht et al.
patent: 6580517 (2003-06-01), Lokai et al.
patent: 2001/0013933 (2001-08-01), Smith et al.
patent: 40 29 687 (1990-09-01), None
patent: 42 25 781 (1992-08-01), None
patent: 41 14 407 (1992-11-01), None
patent: 298 22 082 (1999-02-01), None
patent: 298 22 090 (1999-02-01), None
patent: 299 07 349 (2000-07-01), None
patent: 0 472 727 (1990-11-01), None
patent: 0 570 243 (1993-05-01), None
patent: 0 454 399 (1995-09-01), None
patent: 0 855 811 (1998-07-01), None
patent: 0 875 743 (1998-11-01), None
patent: 0 867 989 (1999-09-01), None
patent: 1 063 503 (2000-12-01), None
patent: 2-631554 (1997-04-01), None
patent: WO 96/07224 (1996-03-01), None
patent: WO 01/18923 (2001-03-01), None
patent: WO 01/46658 (2001-06-01), None
Emara, S., “Wavelength Shifts in Hg198as a Function of Temperature,”Journal of Research of the National Bureau of Standards—A. Physics and Chemistry, vol. 65A, No. 6, Nov.-Dec. 1961, pp. 473-474.
J. Caplan, “Temperature and Pressure Effects on Pressure-Scanned Etalons and Gratings,”Applied Optics, vol. 14, No. 7, Jul. 1975, pp. 1585-1591.
Masakatsu Okada et al., “Electronic Tuning of Dye Lasers by an Electro-optic Birefringent Fabry—Perot Etalon,”Optics Communications, vol. 14, No. 1, pp. 4-7, 1975.
R.B. Green et al., “Galvanic Detection of Optical Absorptions in a Gas Discharge,”Applied Physics Letters, vol. 29, No. 11, pp. 727-729, Dec. 1, 1976.
H. H. Barrett, et al., “Retroreflective arrays as approximate phase conjugators,”Opt. Lett. 4, vol. 4, No. 6, 1979, pp. 190-192.
R.A. Keller et al., “Opto-galvanic Spectroscopy in a Hollow Cathode Discharge,”J. Opt. Soc. Am., vol. 69, No. 5, pp. 738-742, May 1979.
Richard A. Keller et al., Atlas for Optogalvanic Wavelength Calibration,Applied Optics, vol. 19, No. 6, pp. 836-837, Mar. 15, 1980.
N. Tan-No, et al., “Dispersion-free amplification and oscillation in phase-conjugate four-wave mixing in an atomic vapor doublet,”IEEE J. Quantum Electronics, 16, 1980, pp. 147-153.
W. Demtröder,Laser Spectroscopy, published by Springer, Berlin 1981, Chapter 4: Spectroscopic Instrumentation, pp. 99-221.
M.D. Levenson, et al., “Projection photolithography by wave-front conjugation,”J. Opt. Soc. Am, vol. 71, No. 6, Jun. 1981, pp. 737-743.
T.R. Hicks, “Tunable Fabry-Perot Filters,”Opt. Eng., vol. 20, No. 6 (1981) pp. 806-514.
Norman J. Dovichi, et al., “Use of the Optogalvanic Effect and the Uranium Atlas for Wavelength Calibration of Pulsed Lasers,”Applied Optics, vol. 21, No. 8, pp. 1468-1473, Apr. 12, 1982.
D.L. Jordan, et al., “Experimental Measurements of Non-Gaussian Scattering by a Fractal Diffuser,”Applied Physics B., vol. 31, 1983, pp. 179-186.
P. Camus, “Atomic Spectroscopy with Optogalvanic Detection,”Journal De Physique, (Paris) 11C7, pp. C7-87-106, Nov. 1983.
R. Martinez-Herrrero, et al., “Transmitted Amplitude by a Fabry-Perot Interferometer with Random Surface Defects,”Applied Optics, vol. 24, No. 3, Feb. 1, 1985, pp. 315-316.
D.P. Mahapatra, et al., “Exact Evaluation of the Transmittal Amplitude for a Fabry-Perot Interferometer with Surface Defects,”Applied Optics, vol. 25, No. 10, May 26, 1986, pp. 1646-1649.
Andersson, M., et al., “Compressible Favry-Perot Refractometer,”Applied Optics, vol. 26, No. 22, Nov. 15, 1987, pp. 4835-4840.
F. Babin et al., “Ultraviolet Optogalvanic Laser Spectroscopy of Iron for Reference Wavelengths,”Optics Letters, vol. 12, No. 7, pp. 468-470, Jul. 1987.
D.R. Hall, et al.,The Physics and Technology of Laser Resonator, 1989, pp. 1-20, 94-104, 117-131, 143-153, 176-189, 220-245.
R.S. Sandstrom, “Argon Fluoride Excim
Kleinschmidt Juergen
Lokai Peter
Schroeder Thomas
Stamm Uwe
Vogler Klaus Wolfgang
Harvey Minsun Oh
Lambda Physik AG
Nguyen Tuan N.
Stallman & Pollock LLP
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