Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-07-18
2006-07-18
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C378S034000, C378S035000
Reexamination Certificate
active
07079224
ABSTRACT:
The invention is directed to an arrangement for debris reduction in a radiation source based on a plasma, particularly for generating bundled radiation in the extreme ultraviolet (EUV) spectral region. The object of the invention, to find a novel possibility for beam shaping and debris reduction in a radiation source based on a plasma which substantially increases the life of collector optics without having to tolerate a substantial reduction in transparency or a sudden destruction of the protective mechanism, is met according to the invention in that exchangeable additional optics are arranged in the radiation path between a conventional debris filter and the collector optics, wherein a distance-increasing intermediate imaging of the source location relative to the collector optics is provided by the additional optics for further debris reduction.
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Proceedings of SPIE, vol. 4146 (2000) pp. 128-131, Yamamoto et al. “Compact Debris Shutter Design of a laser-Produced Plasma Source for High NA Application”.
Kleinschmidt Juergen
Tran Duc Chinh
Reed Smith LLP
Rutledge D.
XTREME technologies GmbH
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