4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Ju-seon Goo

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Compositions including perhydro-polysilazane used in a...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate

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Compositions including perhydro-polysilazane used in a...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for forming interlevel dielectric layer in semiconductor

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Method of fabricating and curing spin-on-glass layers by electro

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Patent

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Method of planarization using selecting curing of SOG layer

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207254

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