Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate
2005-12-09
2008-09-30
Moore, Margaret G (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From silicon reactant having at least one...
C528S038000
Reexamination Certificate
active
07429637
ABSTRACT:
Compositions that can be used in semiconductor manufacturing processes, comprising perhydro-polysilazane having a weight average molecular weight of about 300 to about 3,000 and a polydispersity index of about 1.8 to about 3.0 are provided. Solutions comprising the compositions of the present invention, methods of forming films in a semiconductor manufacturing process, and methods of manufacturing semiconductor devices are also provided.
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English language abstract 03-232709 Oct. 1991.
English language translation of JP 03-232709, Oct. 1991.
Jung-Ho Lee et al., “A Study on ILD Processes of Simple and CMP Skip Using Polysilazane-Based SOG,” IEEE, 2001, 317-320.
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Goo Ju-seon
Hong Eunkee
Kim Hong Gun
Na Kyu-tae
Moore Margaret G
Myers Bigel & Sibley Sajovec, PA
Samsung Electronics Co,. Ltd.
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