4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

John S. Drewery

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Apparatus for electrically planarizing semiconductor wafers

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for uniform electropolishing of...

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface...
Reexamination Certificate

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Method for planar electroplating

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
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Profile ID: LFUS-PAI-P-1670208

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