Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Collimated deposition apparatus and method
Collimated deposition apparatus and method
Inverted re-entrant magnetron ion source
Magnetron sputter device having planar and curved targets
Non-centric improved pumping stage for turbomolecular pumps
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Profile ID: LFUS-PAI-P-430781