Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent
1986-02-28
1988-09-27
Moore, David K.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Electron or ion source
313230, 3133591, 313160, 313161, 313614, 313618, 31323141, 313357, 31511141, 250426, 204298, C23C 1436, H01J 2702, H05H 100
Patent
active
047744375
ABSTRACT:
An ion source for an intense ion beam from a solid source is formed with a cathode around a central anode. A source of magnetic field with closely spaced poles is formed around a central region of the cathode so that the most intense region of the magnetic field is a torus on the inside of the cathode and the field at the anode is weak. A torus of plasma can be formed near the inside surface of the cathode which can be coated with solid source material. An ion beam can be extracted through an aperture in the cathode.
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Doniger Kenneth J.
Helmer John C.
Cole Stanley Z.
Moore David K.
Powell Mark R.
Sgarbossa Peter J.
Varian Associates Inc.
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