Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Article formed by in-situ cleaning a Ti target in a Ti+TiN coati
As-deposited planar optical waveguides with low scattering...
Method for in-situ cleaning a Ti target in a Ti + TiN coating pr
Ozone generator with improved dielectric and method of manufactu
Reaction chamber having non-clouded window
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Profile ID: LFUS-PAI-P-485253