Article formed by in-situ cleaning a Ti target in a Ti+TiN coati

Details Article formed by in-situ cleaning a Ti target in a Ti+TiN coati Article formed by in-situ cleaning a Ti target in a Ti+TiN coati

1995-03-13

1997-03-04

Robinson, Ellis

Stock material or miscellaneous articles

Composite

Of metal

428216, 428336, 428689, 428698, 428699, B32B 1504

Patent

active

056077769

ABSTRACT:
A novel method of in-situ cleaning a Ti target in a Ti+TiN anti-reflective coating process when such Ti and TiN deposition process are conducted in the same process chamber by the addition of a simple process step and without the use of a shutter.

REFERENCES:
patent: 4783248 (1988-11-01), Kohlhase et al.
patent: 4900630 (1990-02-01), Suzuki et al.
patent: 5240880 (1993-08-01), Hindman et al.
patent: 5289035 (1994-02-01), Bost et al.

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