4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Electromagnetic or particle radiation

Jiann-Jong Wang

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ARC layer enhancement for reducing metal loss during via etch

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent

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Method for controlling the top width of a trench

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method for manufacturing the shallow trench isolation structure

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for performing a pre-amorphization implant (PAI)...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Method of controlling the top width of a deep trench

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-737329

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