4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Grooved and refilled with deposited dielectric material

Ji-Yi Yang

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High-K dielectric metal gate device structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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High-k dielectric metal gate device structure and method for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of forming SOI-like structure in a bulk semiconductor...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Selective nitride liner formation for shallow trench isolation

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-3056535

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