4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jeong-lim Nam

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Apparatus and method for cleaning a semiconductor wafer

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Megasonic cleaning apparatus for fabricating semiconductor...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method of forming a hard mask and method of forming a fine...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of forming a hard mask and method of forming a fine...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Photoresist composition and method of forming a photoresist...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2259273

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