4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Jenspeter Rau

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Apparatus for measuring an exposure intensity on a wafer

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Apparatus for measuring an exposure intensity on a wafer

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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EUV reflection mask

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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Method and apparatus for determining local variation of the...

Optics: measuring and testing – Of light reflection
Reexamination Certificate

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Method for forming an opening in a light-absorbing layer on...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2415603

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