Method and apparatus for determining local variation of the...

Details Method and apparatus for determining local variation of the... Method and apparatus for determining local variation of the...

2005-03-03

2008-08-05

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S239700

Reexamination Certificate

active

07408646

ABSTRACT:
A focused light beam is directed onto a surface patch of a mask and decomposed into partial beams by diffraction at a structure formed on the surface of the mask. Detectors are set such that the intensity of at least two orders of diffraction can be measured. The measured intensities are compared with one another. By way of example, a quotient can be ascertained. The operations are repeated for adjacent surface patches. If the absolute values of the measured intensities fluctuate with a constant quotient, then a variation of the reflection or transmission over the surface of the mask is inferred. If the quotient varies as well, then line width fluctuations within the structure on the mask are inferred.

REFERENCES:
patent: 4332473 (1982-06-01), Ono
patent: 5652657 (1997-07-01), Yoshii et al.
patent: 6555828 (2003-04-01), Bokor et al.
patent: 6990225 (2006-01-01), Tanaka et al.
patent: 2002/0101585 (2002-08-01), Benesch et al.
patent: 2003/0137656 (2003-07-01), Fuse
patent: 2004/0032581 (2004-02-01), Nikoonahad et al.
patent: 2004/0033426 (2004-02-01), Boef et al
patent: 2004/0246476 (2004-12-01), Bevis et al.
patent: 198024 624 (1999-02-01), None
“Applications of OCD Technology: Critical Dimension Measurements on Photomasks”, Mar. 2003, APN-OCD Photomask-R2003MAR, pp. 1-6.

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