Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-07-15
2008-07-15
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
10899318
ABSTRACT:
An apparatus for measuring an exposure intensity on a wafer is disclosed. According to one aspect, an apparatus for measuring an exposure intensity on a wafer includes an exposure device for generating a radiation having a predetermined wavelength. Further, the apparatus includes a mask at a first predetermined distance from the exposure device for patterned exposure of a wafer A detection device detects the exposure intensity at a second predetermined distance from the exposure device. A compensation device can be moved into the beam path between the exposure device and the detection device for the purpose of influencing the beam path.
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Dutch Search Report dated Sep. 5, 2005.
Rau Jenspeter
Teuber Silvio
Fay Kaplun & Marcin; LLP
Infineon - Technologies AG
Rutledge Della J.
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