4. Refrigeration
  5. Storage of solidified or liquified gas
  6. Including cryostat

Jeffrey P. Sercel

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Apparatus and method for purification of gases used in exciplex

Refrigeration – Storage of solidified or liquified gas – Including cryostat
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Method of separating layers of material

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of separating layers of material

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Reexamination Certificate

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Method of separating layers of material

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1453124

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