Apparatus and method for purification of gases used in exciplex

Details Apparatus and method for purification of gases used in exciplex Apparatus and method for purification of gases used in exciplex

1989-04-25

1990-12-18

Capossela, Ronald C.

Refrigeration

Storage of solidified or liquified gas

Including cryostat

55 71, 62 555, 372 57, 372 59, F25B 1900

Patent

active

049777491

ABSTRACT:
A system and method for the purification of laser gases having impurities therein. The pressure on the liquid nitrogen in a Dewar vessel controls the boiling point of the liquid nitrogen. The laser gas to be purified flows into heat exchange relationship with the liquid nitrogen at a temperature above the liquification temperature of the laser gas but below the liquification temperature of the impurities. The impurities are precipitated and removed and the laser gas recycled for further use.

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patent: 2512040 (1950-06-01), Slobod
patent: 2818656 (1958-01-01), Holleman
patent: 2949015 (1960-08-01), Fite
patent: 3721100 (1973-03-01), Bovio
patent: 4302950 (1981-12-01), Sitte
patent: 4317087 (1982-02-01), Sander et al.
patent: 4571954 (1986-02-01), Roberts et al.
patent: 4755201 (1988-07-01), Eschwey et al.

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