4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Jason W. Weigold

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MEMS resonator having an inner element and an outer element...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate

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Method of forming an integrated MEMS resonator

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method of making a micromechanical device from a single crystal

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Method of making a micromechanical device from a single...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate

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Microphone with irregular diaphragm

Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1768919

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