Microphone with irregular diaphragm

Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only

Reexamination Certificate

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C381S175000, C381S369000

Reexamination Certificate

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07961897

ABSTRACT:
A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably coupled with the backplate. The diaphragm has a bottom surface (facing the backplate) with a convex portion aligned with the hole in the backplate.

REFERENCES:
patent: 4492825 (1985-01-01), Brzezinski et al.
patent: 4524247 (1985-06-01), Lindenberger et al.
patent: 4533795 (1985-08-01), Baumhauer, Jr. et al.
patent: 4558184 (1985-12-01), Busch-Vishniac et al.
patent: 4744863 (1988-05-01), Guckel et al.
patent: 4776019 (1988-10-01), Miyatake
patent: 4825335 (1989-04-01), Wilner
patent: 4853669 (1989-08-01), Guckel et al.
patent: 4996082 (1991-02-01), Guckel et al.
patent: 5090254 (1992-02-01), Guckel et al.
patent: 5113466 (1992-05-01), Acarlar et al.
patent: 5146435 (1992-09-01), Bernstein
patent: 5178015 (1993-01-01), Loeppert et al.
patent: 5188983 (1993-02-01), Guckel et al.
patent: 5303210 (1994-04-01), Bernstein
patent: 5314572 (1994-05-01), Core et al.
patent: 5317107 (1994-05-01), Osorio
patent: 5452268 (1995-09-01), Bernstein
patent: 5490220 (1996-02-01), Loeppert
patent: 5542295 (1996-08-01), Howe et al.
patent: 5593926 (1997-01-01), Fujihira
patent: 5596222 (1997-01-01), Bernstein
patent: 5633552 (1997-05-01), Lee et al.
patent: 5658710 (1997-08-01), Neukermans
patent: 5684324 (1997-11-01), Bernstein
patent: 5692060 (1997-11-01), Wickstrom
patent: 5740261 (1998-04-01), Loeppert et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 5923995 (1999-07-01), Kao et al.
patent: 5939633 (1999-08-01), Judy
patent: 5956292 (1999-09-01), Bernstein
patent: 5960093 (1999-09-01), Miller
patent: 6044160 (2000-03-01), Norris
patent: 6128961 (2000-10-01), Haronian
patent: 6140689 (2000-10-01), Scheiter et al.
patent: 6243474 (2001-06-01), Tai et al.
patent: 6249075 (2001-06-01), Bishop et al.
patent: 6487908 (2002-12-01), Geen et al.
patent: 6505511 (2003-01-01), Geen et al.
patent: 6522762 (2003-02-01), Mullenborn et al.
patent: 6535460 (2003-03-01), Loeppert et al.
patent: 6552469 (2003-04-01), Pederson et al.
patent: 6667189 (2003-12-01), Wang et al.
patent: 6677176 (2004-01-01), Wong et al.
patent: 6704427 (2004-03-01), Kearey
patent: 6732588 (2004-05-01), Mullenborn et al.
patent: 6741709 (2004-05-01), Kay et al.
patent: 6753583 (2004-06-01), Stoffel et al.
patent: 6781231 (2004-08-01), Minervini
patent: 6812620 (2004-11-01), Scheeper et al.
patent: 6816301 (2004-11-01), Schiller
patent: 6829131 (2004-12-01), Loeb et al.
patent: 6847090 (2005-01-01), Loeppert
patent: 6857312 (2005-02-01), Choe et al.
patent: 6859542 (2005-02-01), Johannsen et al.
patent: 6914992 (2005-07-01), van Halteren et al.
patent: 2002/0102004 (2002-08-01), Minervini
patent: 2002/0118850 (2002-08-01), Yeh et al.
patent: 2003/0016839 (2003-01-01), Loeppert et al.
patent: 2003/0133588 (2003-07-01), Pedersen
patent: 2004/0179705 (2004-09-01), Wang et al.
patent: 2004/0184632 (2004-09-01), Minervini
patent: 2004/0184633 (2004-09-01), Kay et al.
patent: 2005/0005421 (2005-01-01), Wang et al.
patent: 2005/0018864 (2005-01-01), Minervini
patent: 2005/0089188 (2005-04-01), Feng
patent: 2006/0280319 (2006-12-01), Wang et al.
patent: 2006/0291674 (2006-12-01), Gong et al.
patent: 0 969 694 (2000-01-01), None
patent: WO 83/01362 (1983-04-01), None
patent: WO 01/20948 (2001-03-01), None
patent: WO 02/45463 (2002-06-01), None
patent: WO 2005/036698 (2005-04-01), None
Quanbo Zou et al.,Design and Fabrication of Silicon Condenser Microphone Using Corrugated Diaphragm Technique, Journal of Microelectromechanical Systems, IEEE Service Center, vol. 5, No. 3, Sep. 1996, pp. 197-204.
Authorized Officer Massimo Navarri,International Search Report and the Written Opinion of the International Searching Authority, PCT/US2006/032909, Nov. 13, 2006, 12 pages.
Neumann, Jr. et al.,A Fully-Integrated CMOS-MEMS Audio Microphone, The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems Jun. 8-12, 2003, 4 pages.
Fan et al.,Development of Artificial Lateral-Line Flow Sensors, Solid-State Sensor, Actuator and Microsystems Workshop, Jun. 2-6, 2002, 4 pages.
Hsieh et al.,A Micromachined Thin-film Teflon Electret Microphone, Department of Electrical Engineering California Institute of Technology, 1997, 4 pages.
Bajdechi et al.,Single-Chip Low-Voltage Analog-to-Digital Interface for Encapsulation with Electret Microphone, The 11thInternational Conference on Solid-State Sensors and Actuators, Jun. 10-14, 2001, 4 pages.
Schafer et al.,Micromachined Condenser Microphone for Hearing Aid Use, Solid-State Sensor and Actuator Workshop, Jun. 8-11, 1998, 4 pages.
Microphone industry to expand MEMS-based offerings, The Information Network, online <www.theinformationnet.com>, printed Feb. 1, 2005, Nov. 14, 2003, 2 pages.
Kabir et al.,High Sensitivity Acoustic Transducers with Thin P+ Membranes and Gold Back-Plate, Sensors and Actuators, vol. 78, Issue 2-3, Dec. 17, 1999, 17 pages.
Zou et al.,A Novel Integrated Silicon Capacitive Microphone—Floating Electrode “Electret” Microphone(FEEM), Journal of Microelectromechanical Systems, vol. 7, No. 2, Jun. 1998, 11 pages.
Ko et al.,Piezoelectric Membrane Acoustic Devices, IEEE, 2002, 4 pages.
Chen et al.,Single-Chip Condenser Miniature Microphone with a High Sensitive Circular Corrugated Diaphragm, IEEE, 2002, 4 pages.
Ma et al.,Design and Fabrication of an Integrated Programmable Floating-Gate Microphone, IEEE, 2002, 4 pages.
Maxim Integrated Products,Electret Condenser Microphone Cartridge Preamplifier, Maxim Integrated Products. Jul. 2002, 9 pages.
Ono et al.,Design and Experiments of Bio-mimicry Sound Source Localization Sensor with Gimbal-Supported Circular Diaphragm, The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems, Jun. 8-12, 2003, 4 pages.
Pedersen et al.,A Polymer Condenser Microphone on Silicon with On-Chip CMOS Amplifier, Solid State Sensors and Actuators, 1997, 3 pages.
Yovcheva et al.,Investigation on Surface Potential Decay in PP Corona Electrets, BPU-5: Fifth General Conference of the Balkan Physical Union, Aug. 25-29, 2003, 4 pages.
Fuldner et al.,Silicon Microphones with Low Stress Membranes, The 11thInternational Conference on Solid-State Sensors and Actuators, Jun. 10-14, 2001, 4 pages.
Bernstein et al.,High Sensitivity MEMS Ultrasound Arrays by Lateral Ferroelectric Polarization, Solid-State Sensor and Actuator Workshop, Jun. 4-8, 2000, 4 pages.
Sheplak et al.,A Wafer-Bonded, Silicon-Nitride Membrane Microphone with Dielectrically-Isolated, Single-Crystal Silicon Piezoresistors, Solid-State Sensor and Actuator Workshop, Jun. 8-11, 1998, 4 pages.
Cunningham et al.,Wide bandwidth silicon nitride membrane microphones, SPIE vol. 3223, Sep. 1997, 9 pages.
Phone-Or/Technology, online <file://C:\Documents%20and%20Settings\bmansfield\Local%20Settings\Temporary%20-Internet%20Files\OLKE\Phone-Or%20%...>, printed Feb. 1, 2005, 2 pages.
Mason, Jack,Companies Compete to Be Heard on the Increasingly Noisy MEMS Phone Market, Small Times: News about MEMS, Nanotechnology and Microsystems, Jul. 18, 2003, 4 pages.
Hall et al.,Self-Calibrating Micromachined Microphones with Integrated Optical Displacement Detection, The 11thInternational Conference on Solid State Sensors and Actuators, Jun. 10-14, 2001, 4 pages.
Prismark Partners LLC,The Prismark Wireless Technology Report, Prismark Partners LLC, Mar. 2005, 27 pages.
Stahl, et al., Thin Film Encapsulation of Acceleration Sensors Using Polysilicon Sacrificial Layer,Transducers '03, The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems, Jun. 8-12, 2003, 4 pages.
Bernstein,MEMS Air Acoustics Research the Charles Stark Draper Laboratory, PowerPoint Presentation, Aug. 1999, 8 pages.
Weigold et al.,A MEMS Condenser Microphone for Consumer Applications, Analog Devices, Inc. and Pixtronix, Inc., Jan. 22, 2006, 4 pages.
Gale et al.,MEMS Packaging, University of Utah, Microsystems Principles, PowerPoint Presentation, Oct. 11, 2001, 8 pages.
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