4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

James J. Toomey

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CMOS devices with hybrid channel orientations and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – With current flow along specified crystal axis
Reexamination Certificate

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CMOS devices with hybrid channel orientations and method for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of patterning semiconductor structure and structure...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Pattern enhancement by crystallographic etching

Semiconductor device manufacturing: process – Chemical etching
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Structure and method for formation of a blocked silicide...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-2226711

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