4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

James J. Chambers

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Cross-contamination control for processing of circuits...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Defect control in gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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High dielectric constant metal silicates formed by...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Reexamination Certificate

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High temperature interface layer growth for high-k gate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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High-K gate dielectric defect gettering using dopants

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2320860

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