Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Ablation pattering of multilayered structures
Ablation patterning of multi-layered structures
Borderless contact etch process with sidewall spacer and selecti
Casting of complex micromechanical objects
Crack stop formation for high-productivity processes
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Profile ID: LFUS-PAI-P-552505