Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
Inventor
active
Application of thin crystalline Si.sub.3 N.sub.4 liners in shal
Application of thin crystalline Si.sub.3 N.sub.4 liners in shall
Shallow trench isolation with oxide-nitride/oxynitride liner
Shallow trench isolation with oxide-nitride/oxynitride liner
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