4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Jack Oon Chu

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Abrupt “delta-like” doping in Si and SiGe...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Abrupt delta-like doping in Si and SiGe films by UHV-CVD

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Advance integrated chemical vapor deposition (AICVD) for semicon

Coating apparatus – Gas or vapor deposition
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Advance integrated chemical vapor deposition (AICVD) for...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step of heat treating...
Reexamination Certificate

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Bulk and strained silicon on insulator using local selective oxi

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Profile ID: LFUS-PAI-P-625388

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