4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

ICT Integrated Circuit Testing Gesellschaft für Halbleiterp

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Charged particle beam device and method for inspecting specimen

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Charged particle detection apparatus and detection method

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Charged particle detector assembly, charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With detector
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Device and method for selecting an emission area of an...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Dual mode gas field ion source

Radiant energy – Ion generation – Field ionization type
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