Charged particle beam device and method for inspecting specimen

Details Charged particle beam device and method for inspecting specimen Charged particle beam device and method for inspecting specimen

2011-08-30

2011-08-30

Kim, Robert (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S307000, C250S310000, C250S311000, C250S399000, C250S3960ML

Reexamination Certificate

active

08008629

ABSTRACT:
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.

REFERENCES:
patent: 3483373 (1969-12-01), Asmus et al.
patent: 4044254 (1977-08-01), Krisch et al.
patent: 4209698 (1980-06-01), Hoppe
patent: 4596929 (1986-06-01), Coates et al.
patent: 4757208 (1988-07-01), McKenna et al.
patent: 5063294 (1991-11-01), Kawata et al.
patent: 5422486 (1995-06-01), Herrmann et al.
patent: 5894124 (1999-04-01), Iwabuchi et al.
patent: 6534766 (2003-03-01), Abe et al.
patent: 6559463 (2003-05-01), Ono et al.
patent: 6586746 (2003-07-01), Messick et al.
patent: 6614026 (2003-09-01), Adamec
patent: 6717144 (2004-04-01), Kimura et al.
patent: 6747279 (2004-06-01), Adamec
patent: 6787772 (2004-09-01), Ose et al.
patent: 6815698 (2004-11-01), Nagano et al.
patent: 6855939 (2005-02-01), Rose et al.
patent: 6881956 (2005-04-01), Jau et al.
patent: 6943360 (2005-09-01), Mankos
patent: 7067807 (2006-06-01), Petrov et al.
patent: 7075078 (2006-07-01), Ose et al.
patent: 7105833 (2006-09-01), Brunner et al.
patent: 7138641 (2006-11-01), Matsushita et al.
patent: 7202476 (2007-04-01), Suga et al.
patent: 7223974 (2007-05-01), Petrov et al.
patent: 7233008 (2007-06-01), Petrov et al.
patent: 7326927 (2008-02-01), Frosien
patent: 7335894 (2008-02-01), Frosien et al.
patent: 7351971 (2008-04-01), Tanaka et al.
patent: 7352195 (2008-04-01), Watanabe et al.
patent: 7394066 (2008-07-01), Murakoshi et al.
patent: 7491945 (2009-02-01), Nagano
patent: 7528614 (2009-05-01), Bullock
patent: 2002/0084411 (2002-07-01), Yamazaki et al.
patent: 2003/0062478 (2003-04-01), Frosien et al.
patent: 2004/0000640 (2004-01-01), Kazumori
patent: 2004/0173746 (2004-09-01), Petrov et al.
patent: 2004/0188610 (2004-09-01), Hirose
patent: 2005/0006600 (2005-01-01), Shichi et al.
patent: 2005/0035292 (2005-02-01), Adamec et al.
patent: 2005/0139773 (2005-06-01), Ose et al.
patent: 2005/0253066 (2005-11-01), Watanabe et al.
patent: 2006/0151711 (2006-07-01), Frosien et al.
patent: 2006/0151713 (2006-07-01), Adamec
patent: 2006/0163479 (2006-07-01), Kaji et al.
patent: 1648018 (2006-04-01), None
patent: 02061952 (1990-03-01), None
patent: 07201298 (1995-08-01), None
patent: 10275585 (1998-10-01), None
patent: 2001148227 (2001-05-01), None
patent: 2001273861 (2001-10-01), None
European Search Report dated Mar. 9, 2007.

Affiliated with

Also associated with

Rating

Charged particle beam device and method for inspecting specimen does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam device and method for inspecting specimen, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam device and method for inspecting specimen will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2762601