4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Hyung Joun Yoo

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Catadioptric optical system for lithography

Optical: systems and elements – Lens – With reflecting element
Patent

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Field emission display

Electric lamp and discharge devices – With luminescent solid or liquid material – Vacuum-type tube
Patent

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Fine inductor having 3-dimensional coil structure and method...

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil
Reexamination Certificate

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Method of manufacturing a vacuum device

Semiconductor device manufacturing: process – Electron emitter manufacture
Patent

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X-ray mask

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-656684

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