4. Coating processes
  5. With post-treatment of coating or coating material
  6. Heating or drying

Hyun Dam Jeong

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Composition for dielectric thin film, metal oxide dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Composition for forming low dielectric thin film including...

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Composition for forming low dielectric thin film including...

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Method for forming insulating film between interconnect...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate

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Method for forming interlayer dielectric film for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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