4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Hyo-san Lee

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Apparatus and method for removing photoresist from a substrate

Etching a substrate: processes – Gas phase and nongaseous phase etching on the same substrate
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Apparatus for treating wafers using supercritical fluid

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
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Etching, cleaning and drying methods using supercritical...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Method of fabricating nonvolatile memory device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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PAA-based etchant, methods of using same, and resultant...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-3077032

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