4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Hong J. Wu

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Anti-reflective coating and process using an anti-reflective...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method for fabricating interpoly dielectrics in non-volatile...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Single semiconductor wafer transfer method and manufacturing sys

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent

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Single semiconductor water transfer method and manufacturing sys

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Trench surrounded metal pattern

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1127662

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