4. Cleaning and liquid contact with solids
  5. Apparatus
  6. With plural means for supplying or applying different fluids...

Hisashi Okuchi

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Etching apparatus, a method of controlling an etching...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
Reexamination Certificate

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Etching method and apparatus for semiconductor wafers

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Manufacturing apparatus for semiconductor device and...

Metal working – Barrier layer or semiconductor device making
Reexamination Certificate

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Method of treating a semiconductor substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of treating surface of semiconductor substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2101368

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