4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Hisae Shibuya

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Apparatus of inspecting defect in semiconductor and method...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection apparatus and its method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method and apparatus for analyzing composition of defects

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and apparatus for analyzing defect data and a review...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Method and apparatus for analyzing defect information

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2158237

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