Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2011-05-31
2011-05-31
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S394000, C356S237400
Reexamination Certificate
active
07952699
ABSTRACT:
When size of a defect on an increasingly miniaturized pattern is obtained by defect inspection apparatus in the related art, a value is inconveniently given, which is different from a measured value of the same defect by SEM. Thus, a dimension value of a defect detected by defect inspection apparatus needs to be accurately calculated to be approximated to a value measured by SEM. To this end, size of the defect detected by the defect inspection apparatus is corrected depending on feature quantity or type of the defect, thereby defect size can be accurately calculated.
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Hamamatsu Akira
Maeda Shunji
Shibuya Hisae
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Nguyen Sang
LandOfFree
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