4. Radiant energy
  5. Inspection of solids or liquids by charged particles

Hiroyasu Kaga

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Apparatus for introducing oxygen gas

Electric lamp and discharge devices – Having heating means to control gas/vapor – gas or vapor... – Gas generating
Patent

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Charged beam gun

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Focused ion beam apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Focused ION beam apparatus

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Focused ion beam apparatus and aperture

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-231437

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