4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hiroshi Arimoto

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Apparatus and method for correcting pattern dimension and...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Coated tool and method of manufacturing the same

Stock material or miscellaneous articles – Structurally defined web or sheet – Including components having same physical characteristic in...
Patent

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Fabrication process of a semiconductor device using ellipsometry

Optics: measuring and testing – By dispersed light spectroscopy
Patent

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Layout method of semiconductor circuit, program and design...

Computer-aided design and analysis of circuits and semiconductor – Integrated circuit design processing
Reexamination Certificate

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Method for plasma treatment and apparatus for plasma treatment

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Profile ID: LFUS-PAI-P-334230

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