4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Hideki Yabe

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Film-forming method for X-ray mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Method of making X-ray mask having reduced stress

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Method of manufacturing X-ray mask and heating apparatus

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Method of manufacturing X-ray mask and heating apparatus

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Stress adjustment method of X-ray mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1338958

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