Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
Inventor
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Gas baffle and distributor for semiconductor processing chamber
Impurity control in HDP-CVD DEP/ETCH/DEP processes
Oxygen plasma treatment for enhanced HDP-CVD gapfill
Reactive ion etching for semiconductor device feature...
Reduction of etch-rate drift in HDP processes
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