4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Hayashi Otsuki

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Film forming method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Gas processing apparatus, gas processing method and...

Fluid handling – Systems – With flow control means for branched passages
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Gas processing apparatus, gas processing method and...

Fluid handling – Systems – With flow control means for branched passages
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Method for depositing metallic nitride series thin film

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Method for forming TiSiN film, diffusion preventive film...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1414590

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