Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
2008-04-18
2010-11-09
Fox, John (Department: 3753)
Fluid handling
Systems
With flow control means for branched passages
Reexamination Certificate
active
07828016
ABSTRACT:
A process gas line (255) for carrying WF6gas for nucleation, a process gas line (259) for carrying WF6gas for film deposition after nucleation are joined at a single joint (280) to a carrier gas line (256). A gas line (270) is connected to the joint (280) to carry a mixed gas of the carrier gas and WF6gas to a processing chamber defined by a processing vessel. Sections of the carrier gas line (256) and the gas line (270) extending on the opposite sides of the joint (280) extend along a straight line, and the process gas lines (255, 259) are perpendicular to the gas line (270).
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Japanese Office Action mailed Feb. 3, 2009 for a corresponding application (JP 201357/1999) with partial English translation (3 pages each).
Japanese Office Action issued for 11-211849 on Mar. 17, 2009 with English translation.
Japanese Office Action issued for 2000-254545 on Mar. 17, 2009 with English translation.
Miura Yutaka
Otsuki Hayashi
Fox John
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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